Product Description

XD series vacuum pump 

 XD series vacuum pump is a single-stage rotary vane oil-sealed vacuum pump, which is 1 of main low and medium vacuum equipments. It can be used separately and be as forepump of vacuum pump, mechanical booster pump, and turbo molecular pump.
XD series vacuum pumps are available for low and medium vacuum fields, which are mainly used for pumping air and other dry gases rather than corrosive, toxic, flammable and explosive gases. Furthermore, they cannot pump the gases containing tiny particles or dust and cannot transport other small objects.
XD series vacuum pumps can work for long term in the well-ventilated room with ambient temperature of 5-30 ºC and with humidity ≤80%. In addition to the above applications, the XD series vacuum pumps can be available other applications, such as:
1. To increase the amount of the pumping gas and to improve the vacuum degree, please combine with Roots pumps to form a unit for this.
2. If pumping moist air or condensable gas, the condenser can be installed before the vacuum pump and the gas ballast valve is installed on the vacuum pump.
3. If pumping the gases containing dust particles, the dust filters can be installed in front of the vacuum pump.
4. If pumping the corrosive gases, the corrosion-proof gas filter can be installed in front of the vacuum pump. 



   XD-571   XD-040   XD-063   XD-100   XD-160   XD-202   XD-250    XD-302

        Pumping rate


20 40  63 100  160 202 250 302



  0.1~0.5  0.1~0.5 0.1~0.5  0.1~0.5  0.5 0.1  0.1  0.1



0.75 (single phase0.9Kw 1.5 2.2  3  4.5 4.5  5.5  7.5

Motor Speed


2880 1440  1440 1440 1440 1440  1440  1440

  Noise (db)

≤62 ≤65  ≤65 ≤67  ≤70  ≤72  ≤73   ≤75

Allowable steam pressure


40 40  40  40    40    40   40   40

Working water steam (Kg/h)

 0.3 0.3   1  1.6     2.5     4   4.5   5




82 80   80    84     95   95    81    83

Oil volume



0.5 1   2    2     5    5   7    7




13 40   65     78   140    140   185   201

Air intake thread

Rp3/4″ Rp11/4″ Rp11/4″ Rp11/4″ Rp2″  Rp2″  Rp2″ Rp2″

Overall dimensions


650*300*280 650*300*280 650*430*295 720*430*295 85*50.5*44 85*50.5*44 98*56*44 101*56*44

    Product’s Application


Warranty: One Year
Oil or Not: Oil
Structure: Singel Stage
Exhauster Method: Pumping Air
Vacuum Degree: High Vacuum
Work Function: Mainsuction Pump


vacuum pump

What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?

Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:

Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.

Here are some key roles of vacuum pumps in semiconductor manufacturing:

1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.

2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.

3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.

4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.

5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.

6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.

7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.

8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.

Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.

Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.

vacuum pump

Can Vacuum Pumps Be Used in the Production of Solar Panels?

Yes, vacuum pumps are extensively used in the production of solar panels. Here’s a detailed explanation:

Solar panels, also known as photovoltaic (PV) panels, are devices that convert sunlight into electricity. The manufacturing process of solar panels involves several critical steps, many of which require the use of vacuum pumps. Vacuum technology plays a crucial role in ensuring the efficiency, reliability, and quality of solar panel production. Here are some key areas where vacuum pumps are utilized:

1. Silicon Ingot Production: The first step in solar panel manufacturing is the production of silicon ingots. These ingots are cylindrical blocks of pure crystalline silicon that serve as the raw material for solar cells. Vacuum pumps are used in the Czochralski process, which involves melting polycrystalline silicon in a quartz crucible and then slowly pulling a single crystal ingot from the molten silicon. Vacuum pumps create a controlled environment by removing impurities and preventing contamination during the crystal growth process.

2. Wafering: After the silicon ingots are produced, they undergo wafering, where the ingots are sliced into thin wafers. Vacuum pumps are used in wire saws to create a low-pressure environment that helps to cool and lubricate the cutting wire. The vacuum also assists in removing the silicon debris generated during the slicing process, ensuring clean and precise cuts.

3. Solar Cell Production: Vacuum pumps play a significant role in various stages of solar cell production. Solar cells are the individual units within a solar panel that convert sunlight into electricity. Vacuum pumps are used in the following processes:

– Diffusion: In the diffusion process, dopants such as phosphorus or boron are introduced into the silicon wafer to create the desired electrical properties. Vacuum pumps are utilized in the diffusion furnace to create a controlled atmosphere for the diffusion process and remove any impurities or gases that may affect the quality of the solar cell.

– Deposition: Thin films of materials such as anti-reflective coatings, passivation layers, and electrode materials are deposited onto the silicon wafer. Vacuum pumps are used in various deposition techniques like physical vapor deposition (PVD) or chemical vapor deposition (CVD) to create the necessary vacuum conditions for precise and uniform film deposition.

– Etching: Etching processes are employed to create the desired surface textures on the solar cell, which enhance light trapping and improve efficiency. Vacuum pumps are used in plasma etching or wet etching techniques to remove unwanted material or create specific surface structures on the solar cell.

4. Encapsulation: After the solar cells are produced, they are encapsulated to protect them from environmental factors such as moisture and mechanical stress. Vacuum pumps are used in the encapsulation process to create a vacuum environment, ensuring the removal of air and moisture from the encapsulation materials. This helps to achieve proper bonding and prevents the formation of bubbles or voids, which could degrade the performance and longevity of the solar panel.

5. Testing and Quality Control: Vacuum pumps are also utilized in testing and quality control processes during solar panel production. For example, vacuum systems can be used for leak testing to ensure the integrity of the encapsulation and to detect any potential defects or leaks in the panel assembly. Vacuum-based measurement techniques may also be employed for assessing the electrical characteristics and efficiency of the solar cells or panels.

In summary, vacuum pumps are integral to the production of solar panels. They are used in various stages of the manufacturing process, including silicon ingot production, wafering, solar cell production (diffusion, deposition, and etching), encapsulation, and testing. Vacuum technology enables precise control, contamination prevention, and efficient processing, contributing to the production of high-quality and reliable solar panels.vacuum pump

Can Vacuum Pumps Be Used in the Medical Field?

Yes, vacuum pumps have a wide range of applications in the medical field. Here’s a detailed explanation:

Vacuum pumps play a crucial role in various medical applications, providing suction or creating controlled vacuum environments. Here are some key areas where vacuum pumps are used in the medical field:

1. Negative Pressure Wound Therapy (NPWT):

Vacuum pumps are extensively utilized in negative pressure wound therapy, a technique used to promote wound healing. In NPWT, a vacuum pump creates a controlled low-pressure environment within a wound dressing, facilitating the removal of excess fluid, promoting blood flow, and accelerating the healing process.

2. Surgical Suction:

Vacuum pumps are an integral part of surgical suction systems. They provide the necessary suction force to remove fluids, gases, or debris from the surgical site during procedures. Surgical suction helps maintain a clear field of view for surgeons, enhances tissue visualization, and contributes to a sterile operating environment.

3. Anesthesia:

In anesthesia machines, vacuum pumps are used to create suction for various purposes:

– Airway Suction: Vacuum pumps assist in airway suctioning to clear secretions or obstructions from the patient’s airway during anesthesia or emergency situations.

– Evacuation of Gases: Vacuum pumps aid in removing exhaled gases from the patient’s breathing circuit, ensuring the delivery of fresh gas mixtures and maintaining appropriate anesthesia levels.

4. Laboratory Equipment:

Vacuum pumps are essential components in various medical laboratory equipment:

– Vacuum Ovens: Vacuum pumps are used in vacuum drying ovens, which are utilized for controlled drying or heat treatment of sensitive materials, samples, or laboratory glassware.

– Centrifugal Concentrators: Vacuum pumps are employed in centrifugal concentrators to facilitate the concentration or dehydration of biological samples, such as DNA, proteins, or viruses.

– Freeze Dryers: Vacuum pumps play a vital role in freeze-drying processes, where samples are frozen and then subjected to vacuum conditions to remove water via sublimation, preserving the sample’s structure and integrity.

5. Medical Suction Devices:

Vacuum pumps are utilized in standalone medical suction devices, commonly found in hospitals, clinics, and emergency settings. These devices create suction required for various medical procedures, including:

– Suctioning of Respiratory Secretions: Vacuum pumps assist in removing respiratory secretions or excess fluids from the airways of patients who have difficulty coughing or clearing their airways effectively.

– Thoracic Drainage: Vacuum pumps are used in chest drainage systems to evacuate air or fluid from the pleural cavity, helping in the treatment of conditions such as pneumothorax or pleural effusion.

– Obstetrics and Gynecology: Vacuum pumps are employed in devices used for vacuum-assisted deliveries, such as vacuum extractors, to aid in the safe delivery of babies during childbirth.

6. Blood Collection and Processing:

Vacuum pumps are utilized in blood collection systems and blood processing equipment:

– Blood Collection Tubes: Vacuum pumps are responsible for creating the vacuum inside blood collection tubes, facilitating the collection of blood samples for diagnostic testing.

– Blood Separation and Centrifugation: In blood processing equipment, vacuum pumps assist in the separation of blood components, such as red blood cells, plasma, and platelets, for various medical procedures and treatments.

7. Medical Imaging:

Vacuum pumps are used in certain medical imaging techniques:

– Electron Microscopy: Electron microscopes, including scanning electron microscopes and transmission electron microscopes, require a vacuum environment for high-resolution imaging. Vacuum pumps are employed to maintain the necessary vacuum conditions within the microscope chambers.

These are just a few examples of the wide-ranging applications of vacuum pumps in the medical field. Their ability to create suction and controlled vacuum environments makes them indispensable in medical procedures, wound healing, laboratory processes, anesthesia, and various other medical applications.

China OEM Pumping Speed 60cbm/H Rotary Vane Vacuum Pump   vacuum pump design		China OEM Pumping Speed 60cbm/H Rotary Vane Vacuum Pump   vacuum pump design
editor by CX 2023-11-23